(Ultra)high purity clean pressure gauge-UPG50 / HPG50

(Ultra)High purity gas delivery systems • Gas sticks • Process gas analyzers • Semiconductor

• 304 Stainless steel case
• Electropolished 316L VAR SS/316L SS wetted parts
• Male/Female swivel process connections
(compatible with VCR)
• Helium leak tested to 1X10-9Pa·m³/s
• Suitable for class 100/ISO Class 5 environments

(Ultra)High clean design & packaging
• 100% Helium leak tested
• Double-bagged packaging
• Nitrogen purged

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PRODUCT SPECIFICATION

公称直径 Nominal Diameter (mm)
50 mm
精度等级 Accuracy (%)
ASME 40.100-2013 GradeA
(± 2/1/2% of span)
压力范围 Pressure Range

0 ... 0.1 to 0 ... 40 MPa（0 ... 15 to 0 ... 6,000 psi）Or all other equivalent negative pressure ranges or positive and negative pressure ranges

气路表面粗糙度 Gas path sur face finish
Ra< 10 µin (0.25µm Internal)-EP(VCR)
Ra< 16 µin (0.4µm Internal)-BA(VCR)
Ra< 32 µin (0.8µm Internal)-BA(NPT)
洁净度等级 Cleanliness
IEST-STD-CC1246 Level 100 R1
(Exceeds ASME B40. 100 Level IV)
负载能力 Load Capacity
Stable : 75% FS
Fluctuating pressure : 66% FS
Short time :100% FS
工作环境 Working Environment
Ambient Temperature -40°C ~65°C
Medium max. +100°C
Relative humidity 50%
温度影响 Temperature Influence
Accuracy at temperature above and below the
reference temperature (20°C) will be effected
by approximately ±0.4% per 10°C of full scale